Transporting Specimens into Extremely High Vacuum from Atmospheric Pressure
| Autor: | Kazue Takahashi, Shinjiro Ueda, Kenji Odaka |
|---|---|
| Rok vydání: | 1994 |
| Předmět: |
Hydrogen
Atmospheric pressure Residual gas analyzer Ultra-high vacuum Analytical chemistry chemistry.chemical_element Condensed Matter Physics Methane Surfaces Coatings and Films chemistry.chemical_compound chemistry Carbon dioxide Sublimation (phase transition) Turbomolecular pump Electrical and Electronic Engineering |
| Zdroj: | SHINKU. 37:758-762 |
| ISSN: | 1880-9413 0559-8516 |
| DOI: | 10.3131/jvsj.37.758 |
| Popis: | Specimen transportation into extremely high vacuum was investigated using a system consisting of three chambers manufactured from type 304 stainless steel. The main chamber was evacuated with a turbomolecular pump and a titanium sublimation pump with a shroud at room temperature. Transport from the entry chamber at atmospheric pressure to the main chamber at 7×10-10 Pa through a preparation chamber at 2×10-8 Pa took four hours. Pressure recovery after transport took 30 minutes in the 10-10 Pa range. Residual gas analysis showed that this recovery time might be attributed to slow desorption of the water adsorbed on the main chamber surface during transport. On the other hand, the hydrogen, methane, carbon monoxide and carbon dioxide pressures reached the background level within a few minutes after transport was completed. It was also found that as much methane and carbon oxides as hydrogen were released from the equipment during transport. |
| Databáze: | OpenAIRE |
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