Application of Neutron Depth Profiling to Microelectronic Materials Processing

Autor:	R. G. Downing, R. F. Fleming, J. T. Maki
Rok vydání:	1986
Předmět:	Materials processing Materials science business.industry Analytical chemistry Microelectronics Nanotechnology Neutron depth profiling business
Zdroj:	ACS Symposium Series ISBN: 9780841209343 Microelectronics Processing: Inorganic Materials Characterization
DOI:	10.1021/bk-1986-0295.ch009
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dd052a05e116f5507bc98638bc7d80cb https://doi.org/10.1021/bk-1986-0295.ch009 Zobrazit plný text záznamu