| Popis: |
This report describes the features and use of the Sandia National Laboratories Assembly Test Chip Ver. 01 (ATC01). This chip contains a variety of Al conductor features which are intended for use in corrosion testing. These include triple tracks with a variety of line and gap widths, ladder structures, straight line structures, and van der Pauw sheet resistance structures. The chip is square, approximately 0.250 in. on a side, with a minimum Al feature size of 1.25 {mu}m. The various test structures on the die are described in detail and bonding layout data are given. Finally, we give an example of measurements made on ATC01 when packaged in a 40 lead CERDIP. 15 refs., 7 figs., 7 tabs. |
