Design of an apertureless two-stage acceleration lens for a single-ion implantation system

Autor:	Y. Ishii, T. Ohkubo, N. Miyawaki, Y. Yuri, S. Onoda, K. Narumi, Y. Saitoh
Rok vydání:	2023
Předmět:	Nuclear and High Energy Physics Instrumentation
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 541:200-204
ISSN:	0168-583X
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dcacd82930e38c46217761f1ab8d1200 https://doi.org/10.1016/j.nimb.2023.05.021 Zobrazit plný text záznamu Full Text from ScienceDirect