Raman spectroscopic study of femtosecond laser-induced phase transformation associated with ripple formation on single-crystal SiC

Autor: Shuichi Hashimoto, Shigeru Ueno, Makoto Yamaguchi, Shigeki Matsuo, Toshiaki Murai, Takuro Tomita, Keita Kinoshita, Ryota Kumai
Rok vydání: 2010
Předmět:
Zdroj: Applied Physics A. 99:23-27
ISSN: 1432-0630
0947-8396
DOI: 10.1007/s00339-010-5569-4
Popis: Raman spectroscopy was performed to investigate microscopic structural changes associated with a ripple structure formation initiated by femtosecond laser irradiation on the surface of single-crystal silicon carbide. The amorphous phases of silicon carbide, silicon, and carbon were observed. The intensity ratio between amorphous silicon carbide and silicon changed discretely at the boundary between fine and coarse ripples. The physical processes responsible for the formation of the ripple structure are discussed.
Databáze: OpenAIRE