Evaluating sharpness functions for automated scanning electron microscopy
| Autor: | Joseph M. Maubach, R.M.M. Mattheij, ME Maria Rudnaya |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
Autofocus
Image derivatives Histology Materials science business.industry Scanning electron microscope ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION Scanning confocal electron microscopy Pathology and Forensic Medicine law.invention symbols.namesake Optics Fourier transform law symbols business |
| Zdroj: | Journal of Microscopy. 240:38-49 |
| ISSN: | 0022-2720 |
| DOI: | 10.1111/j.1365-2818.2010.03383.x |
| Popis: | Fast and reliable autofocus techniques are an important topic for automated scanning electron microscopy. In this paper, different autofocus techniques are discussed and applied to a variety of experimental through-focus series of scanning electron microscopy images with different geometries. The procedure of quality evaluation is described, and for a variety of scanning electron microscope samples it is demonstrated that techniques based on image derivatives and Fourier transforms are in general better than statistical, intensity and histogram-based techniques. Further, it is shown that varying of an extra parameter can dramatically increase quality of an autofocus technique. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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