Gap-dependent magnetic anisotropy and high-frequency property of micro-patterned NiFe film
| Autor: | Xinxi Li, Bo Dai, Jiankun Ren, Jun Li, Rui Zhou, Yong Ren, Yan Zhang, Xinxin Zhu, Hao Zhu |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Silicon Magnetometer Scanning electron microscope chemistry.chemical_element 02 engineering and technology Substrate (electronics) 01 natural sciences law.invention law 0103 physical sciences Electrical and Electronic Engineering 010302 applied physics business.industry Demagnetizing field Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Magnetostatics Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Magnetic anisotropy chemistry Optoelectronics 0210 nano-technology business |
| Zdroj: | Journal of Materials Science: Materials in Electronics. 29:9531-9536 |
| ISSN: | 1573-482X 0957-4522 |
| DOI: | 10.1007/s10854-018-8987-2 |
| Popis: | To adjust the high-frequency properties of the soft magnetic film, micro-patterned NiFe films were fabricated on a (100) silicon substrate by using photolithography and magnetron sputtering. Their gap-width were changed from 15 to 60 µm with the strip-length of 5 mm and strip-width of 30 µm. The morphology and magnetic properties of the films were examined by scanning electron microscopy, vibrating sample magnetometer and vector network analysis, respectively. Compared with the continuous NiFe film, the in-plane magnetic anisotropy field (H k ) of micro-patterned NiFe film improved from 0 to 43 Oe. And as the designed gap-width (d) increased from 15 to 60 µm, H k increased from 43 to 80 Oe. The resonance frequency f r is increased up to 8.6 GHz, which is mainly from the demagnetization field and the magnetostatics surface wave energy in our study system. Therefore, the patterned films controlled by various stripe gap-width will also be essential in future high-frequency device design procedures. |
| Databáze: | OpenAIRE |
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