Fabrication of new electrostatic linear actuator

Autor:	T. Matsunaga, K. Kondoh, M. Kumagae, H. Kawara, M. Yasuda, K. Murata
Rok vydání:	2002
Zdroj:	Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387).
DOI:	10.1109/imnc.2000.872634
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dc60b2e99d5ba7d0bf00ebd906ca4624 https://doi.org/10.1109/imnc.2000.872634 Zobrazit plný text záznamu