The variation of the P/N junction position in GaAs/GaAlAs double heterostructures grown by low pressure mo vpe

Autor: Stephen D. Hersee, M. Baldy, J. P. Duchemin
Rok vydání: 1983
Předmět:
Zdroj: Journal of Electronic Materials. 12:345-357
ISSN: 1543-186X
0361-5235
DOI: 10.1007/bf02651136
Popis: A modified contact resistance profiler has been used to determine the dopinq type of the active layer in GaAs/Ga AlAs double heterostructures qrown by low pressure metalorganic vanour phase enitaxy (LP-MO VPE). It was found that under normal growth conditions. The p/n junction is located inside the “p-tyne” Ga0.65Al0.35As confinement layer. SIMS data show that this displacement of the p/n junction is due to electrical compensation of the zinc doping.
Databáze: OpenAIRE