Autor:	Mareike Trappen, Tobias Hoose, Matthias Blaicher, Nicole Lindenmann, Stephan Dottermusch, Philipp Rayling, Kai Sandfort, Fabian Niesler, Michael Thiel
Rok vydání:	2022
Zdroj:	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV.
DOI:	10.1117/12.2609399
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dc351a41f32799a5bee945c9b30d7d0a https://doi.org/10.1117/12.2609399 Zobrazit plný text záznamu