| Autor: |
Syed Mamun R Rasid, Chee Yee Kwok, Hemanshu R. Pota, Ssu-Han Chen, Aron Michael |
| Rok vydání: |
2021 |
| Předmět: |
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| Zdroj: |
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). |
| Popis: |
This paper presents the development of a dynamic analytical model for piezoelectrically driven micro-lens actuator for micro-optics applications. The model uniquely considers the effect of residual stress in the thin films constituting the micro-actuator and the actuating DC offset voltage of the micro-lens actuator. Euler-Bernoulli beam theory is used to formulate the dynamic model. Experiments were performed on the fabricated piezoelectric micro-lens actuator to validate the dynamic analytical model. The results show that the measured resonance frequency of 927 Hz and change in resonance frequency of 4 Hz/V for actuating DC voltage are in good agreement with the analytical dynamic model prediction of resonance frequency 948 Hz and shift in resonance frequency 4.5 Hz/V. This model allows one to predict the dynamic behavior of the micro-lens actuator under the residual stress and actuating DC voltage. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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