Fiber optic sensor for substrate temperature monitoring
| Autor: | Henry F. Taylor, Robert A. Atkins, Yunhae Yeh, William N. Gibler, Chung E. Lee |
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| Rok vydání: | 1990 |
| Předmět: |
Materials science
Optical fiber Silica fiber business.industry Single-mode optical fiber Physics::Optics Polarization-maintaining optical fiber Surfaces and Interfaces Condensed Matter Physics Graded-index fiber Surfaces Coatings and Films law.invention Interferometry Optics Fiber optic sensor law Fiber optic splitter business |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 8:3247-3250 |
| ISSN: | 1520-8559 0734-2101 |
| Popis: | The use of an optical fiber Fabry–Perot interferometric temperature sensor for monitoring substrate temperature in a rf sputtering system is demonstrated. The sensor head consists of a continuous length of single mode silica fiber which contains two internal mirrors a distance of 1.08 cm apart to form the interferometer cavity. The laser light source for the sensor is located outside the vacuum system and connected to the sensor head via a fiber optic feedthrough. The accuracy of the sensor was 0.05 °C in this experiment, but considerable improvement is possible with better signal averaging techniques. The fiber optic sensor provided substrate temperature information during rf plasma excitation, when a nearby thermocouple ceased to function due to electromagnetic interference. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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