Investigations into the flow characteristics of hexagonal ducts etched in <100> silicon

Autor: Paul Regtien, Nicolae Damean
Rok vydání: 2000
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
Popis: This paper focuses on two main subjects encountered in the design process fo the ducts working in the micro yard. They are: the achievement of the Poiseuille number P0 and the achievement of an analytical formula for the velocity field in the hydrodynamically developed flow. These subjects are dictated by the new technologies that support building hexagonal ducts etched in
Databáze: OpenAIRE