STUDY OF VARIOUS PARAMETERS INFLUENCING THE TREATMENT OF SILICON PARTICLES IN A R.F. PLASMA FLOW
| Autor: | F. Bourg, F. Krayem, E. Francke, Sergey V. Dresvin, Daniel Morvan, Jacques Amouroux |
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| Rok vydání: | 2023 |
| Zdroj: | Proceeding of Progress in Plasma Processing of Materials, 2001. |
| DOI: | 10.1615/itppc-2000.480 |
| Databáze: | OpenAIRE |
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