| Autor: |
Masao Hayashi, Masao Tokumura, Toshifumi Kawano, Tatsuro Miyasato, Akio Hiraki, Youichi Kawakami |
| Rok vydání: |
1985 |
| Předmět: |
|
| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :479-480 |
| ISSN: |
0168-583X |
| DOI: |
10.1016/0168-583x(85)90416-1 |
| Popis: |
By means of hydrogen gas chemical sputtering of a graphite target, we have succeeded in the preparation of high insulating diamond-like-carbon (an a-C: H) film by RF- and DC-power. A noteworthy point is that the film can be prepared quite easily by a low temperature (room temperature ∼ 150°C) process. The film contains about 0.8 H/C of hydrogen atoms, and it is estimated that 80 or 90% of the bonding between neighbouring carbon atoms (except the C-H bond) is by a sp3 hybridization bond. The energy gap is from 1.2 to 3.0 eV, which increases with the content of hydrogen atoms as a general tendency. The resistivity is about 1012 Ω cm, and the density of the dangling bond is estimated to be of the order of 10 17 cm 3 . Diamond grains of about a few hundred A in diameter appeared in the film annealed at 1000°C in vacuum. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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