Diagnosis of the profile of the heavy-ion microbeam and estimation of the aiming accuracy of the single-ion-hit with using CR-39

Autor:	Keizo Ishii, Takuro Sakai, Tomihiro Kamiya, Masahiro Takebe, Isamu Nashiyama, Tsuyoshi Hamano, Toshio Hirao
Rok vydání:	1998
Předmět:	Radiation Single ion business.industry Chemistry Microbeam Secondary electrons Beam size Full width at half maximum chemistry.chemical_compound Optics Heavy ion Irradiation business CR-39
Zdroj:	Radiation Physics and Chemistry. 53:461-467
ISSN:	0969-806X
Popis:	The aiming accuracy of the single-ion-hit method has been studied by the measurement of etch-pit patterns on a CR-39 film irradiated with a heavy-ion microbeam. It becomes clear that the aiming accuracy is determined to be the size of the core-part of the microbeam, which is almost twice as large as the full width at half maximum (FWHM) beam size measured by the conventional secondary electron image method.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dbd6352bafc10dc7ac66574de6382186 https://doi.org/10.1016/s0969-806x(98)00133-9 Zobrazit plný text záznamu Full Text from ScienceDirect