The Recent Resolution and Detection Limit Improvement of EDS and EBSD with SEM: Invited Paper

Autor:	Samuel Marks, Iain Anderson, Hirobumi Morita
Rok vydání:	2019
Předmět:	010302 applied physics Detection limit Materials science business.industry Resolution (electron density) 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Software Optics 0103 physical sciences 0210 nano-technology business Electron backscatter diffraction
Zdroj:	2019 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK).
Popis:	EDS and EBSD analysis have been developed more than half a century. As of the X-ray and electron detection devices and software is improved much, the detection limit is also improved now.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dbd35d62ad5b2853fcfdc377d9a435a3 https://doi.org/10.1109/imfedk48381.2019.8950752 Zobrazit plný text záznamu