Preparation and characterization of highly transparent and conductive indium-zinc oxide thin films deposited by pyrolysis spray technique
| Autor: | J.C. Bernède, M. Benbrahim, Mohammed Addou, A. Migalska-Zalas, R. Dounia, A. Outzourhit |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science chemistry.chemical_element 02 engineering and technology Zinc Conductivity 021001 nanoscience & nanotechnology Microstructure 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials chemistry.chemical_compound Carbon film chemistry Chemical engineering Ternary compound 0103 physical sciences Pyrolytic carbon Electrical and Electronic Engineering Thin film 0210 nano-technology Pyrolysis |
| Zdroj: | Optical and Quantum Electronics. 48 |
| ISSN: | 1572-817X 0306-8919 |
| DOI: | 10.1007/s11082-016-0596-9 |
| Popis: | Ternary compound films of ZnO–In2O3 system were prepared by spray pyrolysis method. The films were deposited on heated glass substrates by pyrolytic decomposition of zinc chloride and indium chloride in distilled water with different ratio x of [Zn] to [Zn + In] (x = [Zn]/[Zn + In]). The phase change, chemical composition, electrical and optical properties of the Zn–In oxides were investigated over wide range of ratio x. Quasi-amorphous sub-oxide films with thickness of 200–400 nm were first obtained, the films were then annealed in Argon atmosphere at 550 °C for 1 h. To optimize the physical properties of sprayed ZnO–In2O3 thin films, we carry out on a systematic study of their microstructural characterization and transport properties. Continuous structural variation from In2O3 to ZnO through Zn2In2O5 and Zn3In2O6 was observed on the deposited films with increasing the ratio x. Maximum of conductivity of 1.47 × 103 Ω−1 cm−1 was reached for x = 0.5 (at.%). We also concluded that the transport properties of the films are greatly governed by their microstructure. |
| Databáze: | OpenAIRE |
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