Polysilicon contact structures for silicon solar cells using atomic layer deposited oxides and nitrides as ultra‐thin dielectric interlayers
| Autor: | Jan Benick, Armin Richter, Stefan W. Glunz, Christian Reichel, Frank Feldmann, Martin Hermle |
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| Rok vydání: | 2021 |
| Předmět: |
Materials science
Silicon Renewable Energy Sustainability and the Environment business.industry chemistry.chemical_element Dielectric Nitride Condensed Matter Physics Electronic Optical and Magnetic Materials Atomic layer deposition chemistry Optoelectronics Electrical and Electronic Engineering business Layer (electronics) |
| Zdroj: | Progress in Photovoltaics: Research and Applications. 30:288-299 |
| ISSN: | 1099-159X 1062-7995 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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