Comparison of electrostatic and electromagnetic motors based on fabrication and performance criteria

Autor:	K. Matsuzaki, Y. Mikuriya, T. Matsuo
Rok vydání:	2002
Předmět:	Surface micromachining Materials science Fabrication business.industry Electrical engineering Torque Mechanical engineering Computational electromagnetics Electrostatics business
Zdroj:	1994 5th International Symposium on Micro Machine and Human Science Proceedings.
DOI:	10.1109/ismmhs.1994.512902
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::db97544618401dc59c409a42397b7163 https://doi.org/10.1109/ismmhs.1994.512902 Zobrazit plný text záznamu