An optimized electron beam deflection assembly
| Autor: | M. Batinic, K. Helmreich, W. Wolz |
|---|---|
| Rok vydání: | 1994 |
| Předmět: |
Materials science
business.industry Integrated circuit Condensed Matter Physics Beam parameter product Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Pulse (physics) Optics law Deflection (engineering) Temporal resolution Cathode ray Physics::Accelerator Physics Laser beam quality Electrical and Electronic Engineering business Beam (structure) |
| Zdroj: | Microelectronic Engineering. 24:71-80 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/0167-9317(94)90056-6 |
| Popis: | Electron beam testers, due to their high spatial resolution, are accepted tools for chip-internal measurements on today's sub-micrometer structures. To keep pace also with the development of high-speed integrated circuits, though, the temporal resolution of electron beam measurements still has to be improved. The paper aims to contribute to that. It shows, that the time resolution of the employed sampling technique is still mainly limited by the duration of the electron beam pulse, discusses the mechanisms of beam pulse generation and deduces the design of an optimized beam deflection assembly. Simulation results for the achievable performance are presented as well as experimental results obtained by time resolved monitoring of the beam in a dedicated streak-camera assembly. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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