Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard

Autor: RG White, Richard J. Lee, BR Strohmeier, JD Piasecki, Tim Nunney
Rok vydání: 2010
Předmět:
Zdroj: Microscopy and Microanalysis. 16:436-437
ISSN: 1435-8115
1431-9276
DOI: 10.1017/s1431927610057569
Popis: Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.
Databáze: OpenAIRE