Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard
Autor: | RG White, Richard J. Lee, BR Strohmeier, JD Piasecki, Tim Nunney |
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Rok vydání: | 2010 |
Předmět: | |
Zdroj: | Microscopy and Microanalysis. 16:436-437 |
ISSN: | 1435-8115 1431-9276 |
DOI: | 10.1017/s1431927610057569 |
Popis: | Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010. |
Databáze: | OpenAIRE |
Externí odkaz: |