Investigation of the characteristics of an excimer laser with a narrow emission line

Autor:	K. A. Valiev, D. Yu. Zaroslov, L. V. Velikov, G S Volkov
Rok vydání:	1990
Předmět:	Materials science Excimer laser business.industry medicine.medical_treatment General Engineering Physics::Optics Grating Laser Excimer law.invention Autocollimation Optics law Spectral width medicine Optoelectronics Physics::Atomic Physics Emission spectrum business Lasing threshold
Zdroj:	Soviet Journal of Quantum Electronics. 20:33-36
ISSN:	0049-1748
DOI:	10.1070/qe1990v020n01abeh004786
Popis:	An investigation was made of the spatial coherence of excimer lasers in different resonator geometries. Lasing with a spectral width of 5 nm was obtained in a scheme using a grating in the autocollimation regime and a four-prism telescope. A discussion is given of the questions involved in employing excimer lasers having a narrow laser emission line in photolithographic projection systems.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::db88632c6a394c96b3bd341762d59b69 https://doi.org/10.1070/qe1990v020n01abeh004786 Zobrazit plný text záznamu