MEMS-based uncooled THz detectors for staring imagers

Autor: Christopher J. Zins, Fouad Nusseibeh, Robert E. Higashi, J. Allen Cox
Rok vydání: 2011
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
Popis: We review our previous work to develop an uncooled THz detector capable of achieving an NEΔT ~0.5K at 30Hz frame rate and describe our approach to develop a staring THz camera based on a 2D array of such detectors. Both predicted and measured results of performance metrics (responsivity, NEP, response time, spectral bandwidth, NEΔT) are presented. The measured performance agrees reasonably well with predictions and is consistent with attaining our NEΔT goal. Thus far, 1x4 detector arrays have been fabricated, and 1x8 focal plane arrays have been developed and tested. We briefly discuss our vision to achieve a128x128 detector array needed for a practical staring THz imager and describe the technology challenges needed to realize it.
Databáze: OpenAIRE