| Autor: |
Mehran Mehregany, Christian A. Zorman, Robert Francis Wiser |
| Rok vydání: |
2004 |
| Předmět: |
|
| Zdroj: |
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664). |
| DOI: |
10.1109/sensor.2003.1216978 |
| Popis: |
Vertically-actuated micromechanical resonators operating at MHz frequencies were fabricated from phosphorus-doped polycrystalline silicon carbide (poly-SiC) films. The films were deposited on thin polysilicon sacrificial layers by atmospheric pressure chemical vapor deposition (APCVD) and surface micromachined into structures using a lift-off patterning technique. The resonators were tested under high vacuum conditions using a transimpedance amplifier-based circuit. The measured resonant frequencies were consistent with what was expected based on device designs and material properties; however, the quality factors were much lower than expected. Equivalent circuit modeling suggested that the low quality factors were due to the electrical resistance of the beams, which was unexpectedly high. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
