Positive Tone, Polynorbornene Dielectric Crosslinking
| Autor: | Angelica M. Grillo, Brennen K. Mueller, Jared M. Schwartz, Zachary D. Pritchard, Paul A. Kohl, Sang Y. Lee, Helen W. Li, Edmund Elce |
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| Rok vydání: | 2014 |
| Předmět: |
chemistry.chemical_classification
Materials science Aqueous solution technology industry and agriculture macromolecular substances Quartz crystal microbalance Epoxy Polymer Dielectric Electronic Optical and Magnetic Materials chemistry.chemical_compound Diazonaphthoquinone chemistry Chemical engineering visual_art visual_art.visual_art_medium medicine Swelling medicine.symptom Curing (chemistry) |
| Zdroj: | ECS Journal of Solid State Science and Technology. 4:N3008-N3014 |
| ISSN: | 2162-8777 2162-8769 |
| DOI: | 10.1149/2.0021501jss |
| Popis: | The processing and properties of a positive-tone, aqueous develop, epoxy crosslinked permanent dielectric based on a polynorbornene (PNB) backbone and bis(diazonaphthoquinone) (DNQ) photosensitive compound were investigated. The developing and cure properties of the films were studied as a function of cure temperature, epoxy crosslinker loading and DNQ loading. Reduced modulus measurements showed that crosslinking of the polymer film occurred via reaction of the polymer with DNQ. The final modulus of the DNQ-crosslinked film was 4.0 GPa. Swelling measurements for a UV exposed film showed material leaching from the film. Residual solvent from swelling measurements was analysed by gel permeation chromatography which showed the indene carboxylic acid form of DNQ leached out of the polymer film. The unexposed film did not exhibit material loss through leaching. When developed, films showed a decline in modulus to 2.6 GPa, likely due to the reaction of DNQ with the aqueous base developer forming nonreactive byproducts that did not contribute to crosslinking. An epoxy crosslinker was added to the formulation which helped crosslink the polymer film by inhibiting uptake of the aqueous base during developing. The epoxy inhibition of the base uptake was confirmed by quartz crystal microbalance, where an increase in epoxy loading led to a decrease in base uptake of the film during developing. 19F-NMR results support the DNQ-PNB crosslinking through esterification. Electrical characterization of the cured PNB films showed a relative dielectric constant of 3.65 for a DNQ and epoxy containing film after curing at 220◦C. © The Author(s) 2014. Published by ECS. This is an open access article distributed under the terms of the Creative Commons Attribution 4.0 License (CC BY, http://creativecommons.org/licenses/by/4.0/), which permits unrestricted reuse of the work in any medium, provided the original work is properly cited. [DOI: 10.1149/2.0021501jss] All rights reserved. |
| Databáze: | OpenAIRE |
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