Quantification of the composition of silicon germanium / silicon structures by high-angle annular dark field imaging

Autor:	T Walther, C J Humphreys
Rok vydání:	2022
Zdroj:	Electron Microscopy and Analysis 1997 ISBN: 9781003063056
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::db21235192315fc239830700c8fafc96 https://doi.org/10.1201/9781003063056-78 Zobrazit plný text záznamu