Thin Film on Asic - A Novel Concept for Intelligent Image Sensors

Autor: J. P. M. Schmitt, J. Giehl, Markus Böhm, J. Schulte, H. Fischer
Rok vydání: 1992
Předmět:
Zdroj: MRS Proceedings. 258
ISSN: 1946-4274
0272-9172
DOI: 10.1557/proc-258-1139
Popis: Two different pixel detectors have been fabricated, each of them consisting of an a-Si:H based photodiode layer on top of a crystalline silicon integrated circuit. Both sensors are arranged in a matrix and addressed columnwise, providing parallel readout of the matrix rows or optional random access. One sensor is an a-Si:H detector / x-Si switching transistor combination with 256 × 256 pixels and a pixel size of 100μm × 100μm. The signal transport in the array is examined, demonstrating its capability of very fast information readout. The second sensor, which consists of an array of 32 × 32 pixels on a 5μm PMOS ASIC, performs digital contour extraction. Experimental data on the performance of the intelligent array are also reported.
Databáze: OpenAIRE
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