Method of Examining Surface Cracks on Monocrystalline Silicon

Autor:	Xiao Tang Hu, Yu Chan Liu, Fengzhou Fang, Qing-Xiang Pei
Rok vydání:	2007
Předmět:	Surface (mathematics) Materials science Silicon Mechanical Engineering Micro cracks chemistry.chemical_element Nanoindentation Monocrystalline silicon Crystallography chemistry Mechanics of Materials Energy absorbing General Materials Science Composite material
Zdroj:	Key Engineering Materials. :920-924
ISSN:	1662-9795
DOI:	10.4028/www.scientific.net/kem.364-366.920
Popis:	A new method on examining the micro cracks of monocrystalline silicon during nano indentation is proposed. It is established based on a study of the increasing rate of absorbed energy in nano indentation. This method provides a simple approach in understanding whether cracks on the silicon surfaces occur, while it is tedious in conventional method.
Databáze:	OpenAIRE
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