Influence of the Sol-Gel Synthesis Conditions on the Properties of Thin PbTiO3 Films

Autor:	T. P. Velilla, V. Del C. Martin, R. E. Avila, P.J. Retuert
Rok vydání:	1994
Předmět:	chemistry.chemical_compound Thermogravimetric analysis Materials science Carbon film Chemical engineering chemistry Annealing (metallurgy) Oxide Thermal treatment Thin film Sol-gel Perovskite (structure)
Zdroj:	MRS Proceedings. 361
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-361-439
Popis:	Tetragonal, perovskite type, powders and thin films of PbTiO3 have been synthesized by the sol-gel method, using trihydrate lead acetate and titanium tetraisopropoxide as starting alkoxides. The thermal treatment has been established from differential thermal and thermogravimetric analysis. An interpretation is presented for the various processes occurring during the gel to dense oxide conversion. The optimal process towards thin films includes annealing stages at 180, 400 and 650°C. Thin films were prepared by spinning on Si and Pt-covered Si. By SEM analysis the films appear cracked, porous, or homogeneous, with 0.5 to 1 um per solution coating. Current-voltage characteristics of Al/PT/Pt/Si capacitors exhibit a resistivity of 0.5 to 20·108Ωm, nondestructive breakdown in the range of 4 to over 20V, and relative dielectric permittivity of 100.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dac8fcd1c26624b50ae78839ad05cd69 https://doi.org/10.1557/proc-361-439 Zobrazit plný text záznamu Full text from SpringerLink