Quantitative Evaluation of the Outgassing Rates from a Turbomolecular Drag Pump

Autor:	Kenji Odaka, Osamu Satoh
Rok vydání:	1998
Předmět:	Outgassing Materials science Drag Analytical chemistry Mechanics Electrical and Electronic Engineering Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	SHINKU. 41:698-702
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.41.698
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::da9f67c2b7eafda10e8d94ad867b14ef https://doi.org/10.3131/jvsj.41.698 Zobrazit plný text záznamu