Autor:	J. S. Hickmann, L. F. M. Braun, R. E. Francke, Y. A. Folz
Rok vydání:	1990
Předmět:	Materials science Metallurgy chemistry.chemical_element Surfaces and Interfaces Condensed Matter Physics Evaporation (deposition) Chemical reaction Reflectivity Electrical contacts Surfaces Coatings and Films Adsorption chemistry Aluminium Aluminium alloy inclusions Graphite
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 8:151-152
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.577052
Popis:	A graphite evaporation source for aluminium is described. The procedure for holding the graphite source provides a large area for electrical contact and thermal dissipation. The quality of the film was measured through its reflectivity. (AIP)
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::da7e0044f82311a553a63b05d717362e https://doi.org/10.1116/1.577052 Zobrazit plný text záznamu