Failure Analysis of Filaments of Quadrupole Mass Spectrometer for Plasma Process Monitoring
| Autor: | Junghoon Joo, Dong Hoon Kim, Sung Yong Ha |
|---|---|
| Rok vydání: | 2015 |
| Předmět: |
Tungsten filament
Materials science Materials Science (miscellaneous) Right angle Analytical chemistry chemistry.chemical_element macromolecular substances General Medicine Plasma Tungsten Condensed Matter Physics Protein filament Grain growth chemistry Scientific method Electrical and Electronic Engineering Physical and Theoretical Chemistry Quadrupole mass analyzer |
| Zdroj: | Applied Science and Convergence Technology. 24:142-150 |
| ISSN: | 2288-6559 |
| Popis: | A failure analysis of tungsten filaments used in quadrupole mass spectrometer for plasma process monitoring was carried by using SEM and EDS. Failed at high temperature, filaments showed two kinds of failure modes. The one is that diameter of filament became thinner gradually and finally snapped. The other is that filament abruptly snapped almost at a right angle. The EDS analysis showed Fe and C, including W and Fe, on the surface of failed filament. when failed filaments were treated with plasma in mixture of Ar and CF 4 , the amount of Fe and C decreased. The failure analysis of filament showed that the cause of filament failure is thermal evaporation and grain growth of tungsten at high temperature. |
| Databáze: | OpenAIRE |
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