Discussion of 'Vapor Phase Deposition and Etching of Silicon' [W. H. Shepherd (pp. 988–994, Vol. 112, No. 10)]

Autor:	W. J. Riedl
Rok vydání:	1966
Předmět:	Renewable Energy Sustainability and the Environment Materials Chemistry Electrochemistry Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Journal of The Electrochemical Society. 113:1342
ISSN:	0013-4651
DOI:	10.1149/1.2423825
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::da59b0b2c7f691a76ba50ae17d921093 https://doi.org/10.1149/1.2423825 Zobrazit plný text záznamu