SRPL mapping of semiconductor laser wafers

Autor:	J. Levkoff, R.W. Heebner, G.E. Carver
Rok vydání:	2002
Předmět:	Materials science Photoluminescence business.industry ComputerApplications_COMPUTERSINOTHERSYSTEMS Laser Semiconductor laser theory law.invention Semiconductor law Quantum dot laser Optoelectronics Semiconductor optical gain Wafer business Tunable laser
Zdroj:	Proceedings of LEOS'94.
DOI:	10.1109/leos.1994.586281
Popis:	High bandwidth telecommunications depends on the efficient manufacture of semiconductor lasers. The quality of partially processed laser structures can be monitored at the wafer level by spatially resolved photoluminescence (SRPL), providing timely feedback to processing engineers.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::da54f137fca5dbc3257e80acdcccb102 https://doi.org/10.1109/leos.1994.586281 Zobrazit plný text záznamu