Negative Nonlinear Dissipation in Microelectromechanical Beams

Autor:	Thomas W. Kenny, Nicholas E. Bousse, Anne L. Alter, Hyun-Keun Kwon, James M. L. Miller, Christopher P. Cameron, Gabrielle D. Vukasin
Rok vydání:	2020
Předmět:	Physics Resonator Work (thermodynamics) Nonlinear system Amplitude Mechanical Engineering Mechanics Electrical and Electronic Engineering Nonlinear dissipation Computer Science::Other
Zdroj:	Journal of Microelectromechanical Systems. 29:954-959
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2020.3006800
Popis:	In this work we present measurements of drive-induced negative nonlinear dissipation present in doubly clamped microbeams fabricated in a hermetically sealed package. We characterize the amplitude-frequency nonlinearity and nonlinear dissipation present in this system under direct drive. The negative nature of the nonlinear dissipation is observed when measuring either the directly- or parametrically-actuated response. By comparing to the free ringdown response, we confirm that the nonlinear dissipation is induced by driving the resonator. Drive-induced nonlinear damping is an important consideration for resonant sensors and oscillators operated at large amplitudes. [2020-0140]
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::da491e60720ca8a0bb2b37f7e1456272 https://doi.org/10.1109/jmems.2020.3006800 Zobrazit plný text záznamu