Lubrication of MEMS under vacuum
| Autor: | Jeffrey S. Zabinski, Steven A. Smallwood, K.C. Eapen |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Materials science
Hydrogen bond Intermolecular force Surfaces and Interfaces General Chemistry Condensed Matter Physics Pentaerythritol Surfaces Coatings and Films chemistry.chemical_compound chemistry Chemical engineering Phase (matter) Materials Chemistry Lubrication Organic chemistry Polysilane Lubricant Cyclopentane |
| Zdroj: | Surface and Coatings Technology. 201:2960-2969 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/j.surfcoat.2006.06.011 |
| Popis: | The concept of replenishing lubrication provided by a pair of bound/mobile hydrocarbon-based lubricants has been extended to silicon-based MEMS in vacuum (∼ 1.3 × 10− 4 Pa). Several bound/mobile pairs of lubricants were evaluated to study the effects of bound phase end-group and mobile phase chemical functionality towards performance. The bound species studied were derived from 1-decanol and 1,7-heptanediol. Mobile phases investigated were, a pentaerythritol ester, a multiply alkylated cyclopentane, Pennzane®, and a polysilane developed for spacecraft application. Lubricant performance was compared with data generated in dry air earlier, and also with fresh Fomblin Zdol® under identical conditions of vacuum. The best performance from among those studied was provided by a mixture of bound 1,7-heptanediol and the pentaerythritol ester. An explanation for its superior performance is advanced based on intermolecular hydrogen bonding. |
| Databáze: | OpenAIRE |
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