Study on the influence of the magnetron power supply on the properties of the Silicon Nitride films

Autor:	Evgenii V. Erofeev, Y. V. Petrakov, D. V. Kiseleva, Y N Yurjev, Dmitrii V. Sidelev, D V Korzhenko
Rok vydání:	2017
Předmět:	History chemistry.chemical_compound Materials science Silicon nitride chemistry business.industry Cavity magnetron Optoelectronics business Computer Science Applications Education Power (physics)
Zdroj:	Journal of Physics: Conference Series. 789:012028
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/789/1/012028
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::da3982f20792ffd9ab753cce1c9bde3b https://doi.org/10.1088/1742-6596/789/1/012028 Zobrazit plný text záznamu