Femtosecond laser ablation of indium tin-oxide narrow grooves for thin film solar cells
| Autor: | Qiumei Bian, Baozhen Zhao, Shuting Lei, Zenghu Chang, Xiaoming Yu |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Materials science
Laser scanning business.industry Laser digestive system Fluence Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Indium tin oxide X-ray laser Optics law Femtosecond Electrical and Electronic Engineering Thin film business Layer (electronics) |
| Zdroj: | Optics & Laser Technology. 45:395-401 |
| ISSN: | 0030-3992 |
| DOI: | 10.1016/j.optlastec.2012.06.018 |
| Popis: | Finding ways to scribe indium-tin oxide (ITO) coating plays an important role in the fabrication and assembly of thin film solar cells. Using a femtosecond (fs) laser, we selectively removed the ITO thin films with thickness 120–160 nm on glass substrates. In particular, we studied the effect of laser pulse duration, laser fluence and laser scanning speed on the ablation of ITO. The single pulse ablation thresholds at various pulse durations were determined to ablate ITO thin films. Clean removal of the ITO layer was observed when the laser fluence was above the threshold of 0.30 J/cm |
| Databáze: | OpenAIRE |
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