Autor:	V V Smirnov, V. I. Shapovalov, E A Minzhulina
Rok vydání:	2018
Předmět:	010302 applied physics Materials science Current voltage business.industry 0103 physical sciences Cavity magnetron Optoelectronics 02 engineering and technology 021001 nanoscience & nanotechnology 0210 nano-technology business 01 natural sciences Hot Target
Zdroj:	IOP Conference Series: Materials Science and Engineering. 387:012069
ISSN:	1757-899X 1757-8981
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::da15c864d17ebd8024d3aa7f2eef8bc4 https://doi.org/10.1088/1757-899x/387/1/012069 Zobrazit plný text záznamu