Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty

Autor:	Michael R. Maughan, David F. Bahr
Rok vydání:	2022
Předmět:	Mechanical Engineering Electrical and Electronic Engineering
Zdroj:	Journal of Microelectromechanical Systems. 31:226-233
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2021.3133792
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::da06e8c2b6c33f44a8580ad9d4e72c86 https://doi.org/10.1109/jmems.2021.3133792 Zobrazit plný text záznamu