Development of rf plasma generators for neutral beams

Autor:	W. F. DiVergilio, M. C. Vella, R. V. Pyle, P. A. Pincosy, D. Kippenhan, K. W. Ehlers, V. V. Fosnight
Rok vydání:	1985
Předmět:	Fabrication Hydrogen Chemistry business.industry chemistry.chemical_element Surfaces and Interfaces Plasma Low frequency Condensed Matter Physics Surfaces Coatings and Films Power (physics) Reliability (semiconductor) Optics Atomic physics business Electrical efficiency Beam (structure)
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 3:1218-1221
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.573067
Popis:	The development of low frequency (1–2 MHz) rf plasma generators for high power neutral beam applications is summarized. Immersed couplers from one to three turns were used. Acceptable plasma profiles, ≤15% max/min, were obtained in a variety of field‐free, magnetic bucket and magnetic filter‐bucket sources, with 10×10 or 10×40 cm extraction areas. Hydrogen beam properties were measured with a 7×10 cm accelerator operated at 80 kV. Atomic fraction and power efficiency were at least as high as with arc plasmas in similar chambers. The potential advantages of an rf plasma source are: ease of operation; reliability; and extended service lifetime.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d9bf0a3b0e2d8a5dfb21680cb3dcba04 https://doi.org/10.1116/1.573067 Zobrazit plný text záznamu