Texture development of CeO2 thin films deposited by ion beam assisted deposition
| Autor: | R. Fromknecht, J. Wang, G. Linker |
|---|---|
| Rok vydání: | 2003 |
| Předmět: |
Materials science
business.industry Ion plating Analytical chemistry Surfaces and Interfaces Combustion chemical vapor deposition Sputter deposition Condensed Matter Physics Surfaces Coatings and Films Amorphous solid Pulsed laser deposition Carbon film Optoelectronics Thin film business Ion beam-assisted deposition |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:62-65 |
| ISSN: | 1520-8559 0734-2101 |
| DOI: | 10.1116/1.1521963 |
| Popis: | CeO2 thin films were prepared on amorphous quartz glass substrates by the ion beam assisted deposition (IBAD) technique at room temperature. In order to control both the in-plane and out-of-plane texture of the films, a special geometrical arrangement of the ion sources, the target, and the substrate was used. A new concept, considering the role of reflected particles from the target, which we call self-IBAD, was introduced. The structural properties of the CeO2 films were investigated by x-ray diffraction. Good biaxially textured films were obtained with out-of-plane mosaic spreads of 3.0° and in-plane alignment of 10.8°. |
| Databáze: | OpenAIRE |
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