Single-crystal diamond micro-cupped resonators made by laser ablation
| Autor: | He Hanhui, Wei Li, Dingbang Xiao, Xue Zhong Wu, Zhanqiang Hou |
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| Rok vydání: | 2015 |
| Předmět: |
Imagination
Materials science Fabrication medicine.medical_treatment media_common.quotation_subject Nanotechnology 02 engineering and technology engineering.material 01 natural sciences law.invention Resonator law 0103 physical sciences medicine Electrical and Electronic Engineering 010301 acoustics media_common Laser ablation business.industry Diamond Gyroscope 021001 nanoscience & nanotechnology Condensed Matter Physics Ablation Electronic Optical and Magnetic Materials Hardware and Architecture engineering Optoelectronics 0210 nano-technology business Beam (structure) |
| Zdroj: | Microsystem Technologies. 22:2603-2610 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | This paper presents a novel three-dimensional fabrication process of micro-scale shell resonator made of single-crystal diamond (SCD) called micro-cupped resonator (MCR). The key feature of the process is the application of laser ablation, which can contribute to the shaping process of SCD with higher accuracy, better structural symmetry, greater speed, and lower breakage rate. UV laser high precision processing machine has been employed for the ablation of SCD in the present investigation. This paper describes the principle of laser ablation of SCD and analyses the effects of beam parameters on ablation quality. Then MCR with better structural symmetry and less structural imperfection has been successfully fabricated based on optimum parameters by laser ablation. The MCR is promising for emerging applications such as micro rate-integrating gyroscope. |
| Databáze: | OpenAIRE |
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