Improvements to the design of an electrostatic toroidal backscattered electron spectrometer for the scanning electron microscope
| Autor: | A. V. Gostev, E. I. Rau, M. Osterberg, A. Khursheed |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Conventional transmission electron microscope
Scanning Hall probe microscope Electron spectrometer Materials science Spectrometer Physics::Instrumentation and Detectors business.industry Scanning confocal electron microscopy Optics Scanning transmission electron microscopy Electron beam-induced deposition Nuclear Experiment business Instrumentation Environmental scanning electron microscope |
| Zdroj: | Review of Scientific Instruments. 73:227-229 |
| ISSN: | 1089-7623 0034-6748 |
| Popis: | Design improvements of a toroidal sectoral backscattered electron energy spectrometer adapted for application in the scanning electron microscope were made. Various geometrical parameters in the design of the spectrometer were optimized on the basis of simulation and improvement in the energy resolution of the spectrometer by more than a factor of 2 was confirmed by experiment. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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