Process Modeling Of The Laser Induced Surface Modification Of Ceramic Substrates For Thermal And Electrical Lines In Microsystems

Autor:	Roland Heidinger, Karl-Heinz Zum Gahr, Johannes Schneider, Herbert Gruhn, Sabine Rüdiger, Magnus Rohde
Rok vydání:	2000
Předmět:	Materials science Substrate (electronics) Laser Finite element method law.invention law visual_art Thermal visual_art.visual_art_medium Surface modification Ceramic Laser power scaling Composite material Process simulation
Zdroj:	MRS Proceedings. 617
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-617-j5.3
Popis:	Laser induced surface modification has been used to fabricate conducting paths in ceramic substrates. For the purpose of process simulation and prediction of process parameters a finite element model has been developed to simulate the thermal behaviour of the substrate during laser surface interaction. The results of the model calculation have been verified experimentally for alumina and Cordierite substrates. Using this model the width and the depth of the fabricated lines could be predicted as a function of the laser power and velocity. The stresses due to thermal mismatch are estimated and identified as the likely reason for crack formation which reduces the functionality of the conducting paths. Further developments will consider different ceramic substrates such as PZT.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d989f9dd71ca57f2f93fb1c2107c7671 https://doi.org/10.1557/proc-617-j5.3 Zobrazit plný text záznamu Full text from SpringerLink