Impact of Young Modulus of Epoxy Glue to Copper Wire Bonding

Autor: El Chung, KG Tan, CM Wai, Dandong Ge
Rok vydání: 2018
Předmět:
Zdroj: 2018 IEEE 38th International Electronics Manufacturing Technology Conference (IEMT).
DOI: 10.1109/iemt.2018.8511763
Popis: Epoxy glue still remains as one of the main medium being used for die attach process in current semiconductor technologies. Different types of epoxy glue have different young modulus due to their own properties from different epoxy glue manufacturer. The current chip size is getting smaller and smaller due to cost saving projects from FE wafer fab. If the chip size is getting smaller but still using the same epoxy glue, then the low young modulus of the epoxy glue will become a big challenge especially for copper wire bonding process due to high Z die displacement during wire bonding process. This is due to the ultrasonic energy will not be transmitted effectively to the copper wire and bond pad surface without rigid support to the chip. In this paper, different die attached chip sizes are being studied with different young modulus epoxy glue using simulation tool to measure the die z displacement and also actual copper wire bonding process to assess the wire bonding performance.
Databáze: OpenAIRE