The dynamics of a vibrating silicon diaphragm microgyroscope

Autor:	David Wood, A J Harris, JS Burdess, J L Cruickshank
Rok vydání:	2000
Předmět:	Engineering Silicon business.industry Mechanical Engineering Acoustics Vibrating structure gyroscope chemistry.chemical_element Equations of motion Gyroscope Mistuning law.invention chemistry law Control theory Harmonic Damping factor Wafer business
Zdroj:	Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science. 214:1379-1388
ISSN:	2041-2983 0954-4062
Popis:	This paper describes the principal features of a microgyroscope bulk machined from a [100] silicon wafer by chemical etching. The equations of motion of the gyroscope are derived and the factors that determine both the mechanical and electrical characteristics of the device are identified. The response to constant and harmonic rates of turn is evaluated for both tuned and untuned gyros. Gyro performance is shown to depend upon the relationship between the mistuning of the primary and secondary modes and the secondary mode damping factor.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d9370bbdc1d8bc4e3cd6e142d8c6f653 https://doi.org/10.1243/0954406001523353 Zobrazit plný text záznamu