Optimization of thermal distribution in ceramics and LTCC structures applied to sensor elements
| Autor: | Karol Nitsch, Reinhard Bauer, Heiko Thust, Torsten Kirchner, Leszek Golonka |
|---|---|
| Rok vydání: | 1998 |
| Předmět: |
Materials science
Heating element Laser cutting Nitride Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Temperature gradient law visual_art Lamination Thermal visual_art.visual_art_medium Electronic engineering Ceramic Electrical and Electronic Engineering Composite material Punching |
| Zdroj: | Microelectronics International. 15:34-38 |
| ISSN: | 1356-5362 |
| DOI: | 10.1108/13565369810215618 |
| Popis: | Thermal properties of Pt or RuO2 thick‐film heaters made on alumina, aluminum nitride or low temperature co‐fired ceramics (LTCC) were compared in the first step of our work. Special holes to improve the heat distribution were included. Several heater layouts were analysed. The heat distribution was measured by an infrared camera, at different heating power. Second, the optimization of LTCC constructions was carried out. The simple structure of LTCC permitted the achievement of a high package density. It was possible to integrate a heating element made from special thick‐film ink as a buried film, inside a substrate. An important step in our technology was the making of the holes. A pattern of holes (achieved by punching or laser cutting) around the heating area permitted a changeable heat gradient. The quality of lamination and the structure of the buried elements were investigated with an ultrasonic microscope. |
| Databáze: | OpenAIRE |
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