Fabrication of Micro-Pillar Array on Silicon Surface by Femtosecond Laser Direct Writing Mask

Autor:	丁铠文 Kaiwen Ding, 田亚湘 Yaxiang Tian, 满姝 Shu Man, 张帆 Fan Zhang, 吴碧微 Biwei Wu
Rok vydání:	2019
Předmět:	Surface (mathematics) Fabrication Materials science Silicon business.industry Pillar chemistry.chemical_element Laser direct writing Atomic and Molecular Physics and Optics chemistry Femtosecond Optoelectronics Electrical and Electronic Engineering business
Zdroj:	Laser & Optoelectronics Progress. 56:183201
ISSN:	1006-4125
DOI:	10.3788/lop56.183201
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d902f9fe1d173a87f325219687cf2cc0 https://doi.org/10.3788/lop56.183201 Zobrazit plný text záznamu